On the Multipole Resonance Probe : Current Status of Research and Development

Oberrath, Jens; Friedrichs, Michael; Gong, Junbo; Oberberg, Moritz; Pohle, Dennis; Schulz, Christian; Wang, Chunjie; Awakowicz, Peter; Brinkmann, Ralf Peter; Lapke, Martin; Mussenbrock, Thomas; Musch, Thomas; Rolfes, Ilona

doi:10.1109/TPS.2021.3113832

Publisher DOI:	10.1109/TPS.2021.3113832
Title:	On the Multipole Resonance Probe : Current Status of Research and Development
Language:	English
Authors:	Oberrath, Jens Friedrichs, Michael Gong, Junbo Oberberg, Moritz Pohle, Dennis Schulz, Christian Wang, Chunjie Awakowicz, Peter Brinkmann, Ralf Peter Lapke, Martin Mussenbrock, Thomas Musch, Thomas Rolfes, Ilona
Keywords:	Active plasma resonance spectroscopy (APRS); Electrodes; Materials requirements planning; multipole resonance probe (MRP); plasma control; plasma diagnostic; Plasma measurements; plasma monitoring.; Plasmas; Probes; Resonant frequency; Temperature measurement
Issue Date:	Nov-2021
Publisher:	IEEE
Journal or Series Name:	IEEE transactions on plasma science
Volume:	49
Issue:	11
Startpage:	3293
Endpage:	3298
URI:	http://hdl.handle.net/20.500.12738/11800
ISSN:	1939-9375
Review status:	This version was peer reviewed (peer review)
Institute:	Department Informations- und Elektrotechnik Fakultät Technik und Informatik
Type:	Article
Appears in Collections:	Publications without full text