Atomic scale properties of interior interfaces of semiconductor heterostructures as determined by quasi-digital highly selective etching and atomic force microscopy

Rettig, Rasmus; Stolz, Wolfgang

doi:10.1016/S1386-9477(98)00058-7

Publisher DOI:	10.1016/S1386-9477(98)00058-7
Title:	Atomic scale properties of interior interfaces of semiconductor heterostructures as determined by quasi-digital highly selective etching and atomic force microscopy
Language:
Authors:	Rettig, Rasmus Stolz, Wolfgang
Keywords:	Atomic force microscopy; Etching; Heterostructures; Interfaces; Semiconductors
Issue Date:	15-Jul-1998
Publisher:	Elsevier
Journal or Series Name:	Physica. E, Low-dimensional systems & nanostructures
Volume:	2
Issue:	1-4
Startpage:	277
Endpage:	281
URI:	http://hdl.handle.net/20.500.12738/11975
ISSN:	1386-9477
Institute:	Philipps-Universität Marburg Philipps-Universität Marburg. Fachbereich Physik
Type:	Article
Appears in Collections:	Publications without full text